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Tetraethyl orthosilicate-E grade

Name: Tetraethyl orthosilicate-E grade
Brand: Siwin
Rating: 5.0 (24 reviews)

Silane Siwin-TEOS

electronic garde

Vinyltriisopropenoxysilane

Formulation	Si（C2H5O）4
Molecule weight	208.33
Cas no.	78-10-4
Physical properties	Colorless transparent liquid Melting point:－77℃， Boiling point: 169℃， Density: 0.93g/mL。 Stable in water；slight soluble in water and hydrolyze in pure water, hydrolyze more quickly in acids and bases。
Applications	It is mainly used in the chemical vapor deposition (CVD) process during wafer manufacturing, and reacts with O2 / O3 / N2O to form silicon dioxide films. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and micro-electromechanical systems (MEMS)

Typical Physical Properties

Items	Standard data	Itms	Standard data
Purity（）min	99.999999 (8N)	锰（Mn）max	0.1 ppb
铝（Al）max	0.2ppb	钼（Mo）max	0.1 ppb
银（Ag）max	0.1 ppb	钠（Na）max	0.5 ppb
砷（As）max	0.4 ppb	铌（Nb）max	0.1 ppb
金（Au）max	0.1 ppb	镍（Ni）max	0.2 ppb
硼（B ）max	0.5 ppb	铅（Pb）max	0.1 ppb
钡（Ba）max	0.1 ppb	锑（Sb）max	0.1 ppb
铍（Be）max	0.1 ppb	锡（Sn）max	0.2 ppb
铋（Bi）max	0.1 ppb	锶（Sr）max	0.1 ppb
钙（Ca）max	0.5 ppb	钍（Th）max	0.1 ppb
镉（Cd）max	0.1 ppb	钨（W ）max	0.1 ppb
钛（Ti）max	0.1 ppb	锌（Zn）max	0.2 ppb
铀（U ）max	0.1 ppb	Cl- max	0.5ppm
钒（V ）max	0.1 ppb	Water max	5ppm
钴（Co）max	0.4 ppb	Ethanol max	3ppm
铜（Cu）max	0.2 ppb	particle≥0.1µm max	50p/ml
铬（Cr）max	0.2 ppb	particle≥0.2µm max	30p/ml
铁（Fe）max	0.2 ppb	particle≥0.3µm max	20p/ml
锆（Zr）max	0.1 ppb	particle≥0.5µm max	10p/ml
镓（Ga）max	0.4 ppb	particle≥1.0µm max	3p/ml
汞（Hg）max	0.3 ppb	Chromacity max	10APHA
钾（ K）max	0.2 ppb	Main content（）min	99.99
锂（Li）max	0.1 ppb	Appearance	Colorless transparent liquid
镁（Mg）max	0.5 ppb	Shelf life	24 months

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